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PARTS, BROOKS FIXLOAD V6  




 
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valves Module  SS5Y3-42-04-C6F-0*Z-3098   PN 65509  
 valves Module &
vacuum sensor   VPEV-W-KL- LED-GH   PN 35033  
 vacuum sensor  
Through beam mapper (right type)   swiv. motor w. RC filter   PN 701-0402-01  
 Through beam mapper
Through beam mapper (left type)   swiv. motor w. RC filter   PN 701-0401-01  
 Through beam mapper
suction cup assembly   PN 013083-723-13  
solenoid valve 5/3   SY3420-5LOU*Z3097   PN 65489  
short stroke cylinder   CDQ2B20-30D*Z3040   PN 65488
shock absorber   YSR12-12-SA206422   pdo_h1/h2 PN 701-0133-01  
 shock absorber  
shock absorber   YSR-8-8-SA206420  ( lp d1/d2, pdd d1) PN 701-0152-01  
 shock absorber  
sensor PM2-LH10 as cabel 919 (FOUP placed)   PN 013502-919-25  
 sensor PM2-LH10 as c
sensor PM2-LH10 as cabel 918 (FOUP placed)   PN 013502-918-25  
 sensor PM2-LH10 as c
Rreflective-Type Sensor   PM2-LF10   PN: BRKS43939
 reflective-type sens
ribbon cable   PANTA-FIX E10-P225-N/W   PN 68015
REFLECTOR PN:013083-010-28
reflective-type sensor PM2-LH10   PN 44223  
 reflective-type sens
reflected light sensor   MLV-15-54/48   PN 50845
 reflected light sens
pressure sensor   PEV-W-KL- LED-GH   PN 33871  
 pressure sensor &nbs
pressure regulator   LRM-M1-G1/8-07G   PN 54891  
 pressure regulator &
PCB PNEUMATIC STOP 2 PN:01350-090-25
PCB PIF module   PN 013501-140-25  


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